P0972UN 产品说明：

PLC控制系统程序的调试 

    PLC控制系统程序的调试一般包括I/O端子测试和系统调试两部分内容，良好的调试步骤有利于加速总装调试的过程。 

4.1 I/O端子测试 

    用手动开关暂时代替现场输入信号，以手动方式逐一对PLC输入端子进行检查、验证，PLC输入端子的指示灯点亮，表示正常;反之，应检查接线或者是I/O点坏。 

    我们可以编写一个小程序，在输出电源良好的情况下，检查所有PLC输出端子指示灯是否全亮。PLC输入端子的指示灯点亮，表示正常。反之，应检查接线或者是I/O点坏。 

4.2 系统调试 

    系统调试应首先按控制要求将电源、外部电路与输入输出端子连接好，然后装载程序于PLC中，运行PLC进行调试。将PLC与现场设备连接。在正式调试前全面检查整个PLC控制系统，包括电源、接地线、设备连接线、I/O连线等。在保证整个硬件连接正确无误的情况下即可送电。 

P0972UN

【厦门光沃自动化设备有限公司】

【联 系 人：陈小姐】

【免费热线：0592-5709825】

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P0972UN 参数说明：

Aera MFC TC FC-980C, MULTI, MULTI-1

Aera MFC TC FC-980C, BCL3,100 SCCM

Aera MFC, 10 RA FC-980C, SiH4, 20 SCCM

Aera MFC FC-770AC Ar 200 SCCM

Aera MFC FC-770AC, N2 200 SCCM

Aera MFC, TC FC-980 PH3/He 500 SCCM 800PPM

UNIT 1660 UFC-1660 He 10 SLPM with calabration sheet

Brooks Pure Digital 6256, Mod # 6256B7BA2ADLAA

Brooks Mass Flow Controller 5964, Mod # 5964

OMEGA CN371-KC2, NEW

Brooks MFC 6256S, Mod # 6256SBZVCLA, Gas CH3F

NUPRO 6LV-BNBW4-O with VCR connection

Flow Meter and Pressure gauge, Norgren polycarbonate 

New MRC AlCu Target from Williams Advanced Materials

MKS 109070028CE, Vacuum gauge, New

Reliance Conductor Small D-C motors

AE RFPP LF-5 RF Generator and RFPP ATL-100RA RF Match

9 New Schneider Electric Circuit breaker 20A

N-48 KEYENCE TERMINATOR 0106043 lots of 3

7 New AMAT 0680-02000, CB MAG Therm, 1P

BELKIN OMNI VIEW FCKG240354 QG

2 Applied Materials 0680-00323

Schneider Electric Circuit Breaker 25A lots of 7

Schneider Electric Circuit Breaker 10A lots of 13

Schneider Electric Circuit Breaker 30A lots of 7, New

SPI Shock Proof 24-344-4, step height measurement

2 New Arrow Hart 6612, locking plug, AMAT 0720-01203

FACTS Engineering T1F-16AD-2

2 New AMAT 1200-90079 Relay 24 VAC 10 AMP 4DPT 

2 Applied materials 0680-01738

KEPCO Power supply RAX15-20K

AMAT 0680-00034, CB, New

KEPCO Power supply RAX48-3, 6K Lots of 3

Novellus Controller I/ 0 Daulcap Firmware Version 4.8

STEC Inc MFT-20

AMAT 0100-76124 Digital I/O PCB. used, untested

Mykrolis CDL1102, 0-10 TORR lots of 2

MILLIPORE CDLD-21S06, 0-100 TORR

INFICON AG, LI-9496 Balzers, CDG100A, 100 TORR 

Vacuum general pressure transducer CML-21, 100 TORR

Comdel CLF-5000 RF Generator, Novellus 27-10140-00, 

ENI Genesis GW5002MA-F1H131?-A3 3000W RF Generator W/Cal

Veeco XRF-2000AT X-Ray Measurement System

Granville-Phill?ips 275 MINI-convectron lots of 3 used

MYKROLIS intelli flow 3XP, N2 1000SCCM lots of 2 used

MYKROLIS intelli flow 3XP, NF3 5000 SCCM used

MYKROLIS intelli flow 3XP, N2, 5000 SCCM lots of 3 used

MYKROLIS intelli flow, O2, 10000 SCCM used

MILLIPORE 853011054001, 0-10 TORR, 0-10 VDC, used

EDWARDS Adjustable vacuum switch VS16K, 30-1000mBar

COMDEL LFMN 8/5, novellus P/N 27-296658-00

NOVELLUS ISIOC HI-LO Transfer 02-150755-00 REV.A

ISIOC Power supply, 02-125105-00, 27-053659-00 used

NOVELLUS Controller I/O DUALCAP 27-156710-00, REV.C