ACTION PAK 7010-124
1810-329156-11 Focus ring
1D05-200020-11 DEPO SHIELD QU-A-3
1D05-200031-11 COVER BAFFLE Q-L3(DRM2)
1D05-200033-11 SUPPORT SHIELD DEPO Q-S5(DRM2)
1D05-300040-13 Ring Insulator C
1D05-300052-13 Ring Insulator A7
1D05-300053-14 Ring Insulator B2
1D05-300067-13 PLATE UPPER Q
1D05-300133-11 RING INSULATOR LA6.0
1D05-300296-11 RING F-8SO-Q-260-6H
1D10-200921-12 Ring Depo. Shield P1
1D10-200922-12 Ring Depo. Shield P2
1D10-302209-14 Focus Ring (Round)
1D10-304010-12 Ring Shield B3
1D10-309822-12 Ceramic DEPO Shield
1D10-309823-11 Ceramic Ring A8
1D10-309946-11 Focus Ring (inside step polish)
1D10-309946-12 Focus Ring (inside step no polish)
1D10-310753-11 Ceramic a-8-2 Ring
1805-220177-12 RING, SHIELD T5-280 QUARTZ SCCM
1810-329157-11 Cooling ring
1805-320127-11 BASE RING, INTEGRATED
1805-320141-11 COVER, RING OUTER TEL SCCM
1D10-310020-11 Focus Ring
1D05-300052-13XM Ring Insulator A7
0200-00137 Focus Ring 8" DPS METAL
0200-00149 PLASMA TUBE R1 8" DPS ASP
0200-00175 Dome Ceramic, Poly DPS 8" Dps Poly
0200-00247 Capture Ring 8" DPS Metal
0200-00332 Qtz single ring 8" DPS poly
0200-09201 LOWER G.D.P 8" DPS ASP
0200-09432 PLASMA TUBE R0 8" DPS ASP
0200-09444 TOP CAP 8" DPS ASP
0200-09445 SPACER TOP 8" DPS ASP
0200-09448 UPPER G.D.P 8" DPS ASP
0200-09478 Plate, Gas Distribution, Upper, 200mm, ASP, Prsp3 8" DPS ASP
0200-10324 Dome 8" DPS METAL
0200-10377 Single Ring Ceramic Poly 8" DPS POLY
0200-35267 DOME, Ceramic DPS METAL 8" DPS METAL
0200-35290 Housing, Gas Feed, DPS MEC Chamber 8" DPS METAL
0200-35291 Plug, Inner, Gas Feed Assy 8" DPS METAL
0200-35292 WINOOW Endpoint DPS MEC 8" DPS All
0200-35293 WINOOW Manometer Port DPS MEC 8" DPS All
0200-35294 Quartz Lower Chamber VPRT DPS 8" DPS All
0200-35295